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Peterson, Becky (R.L.)
Associate Professor, EECS - Electrical and Computer Engineering
Director, Lurie Nanofabrication Facility
Associate Professor (courtesy), Applied Physics, Materials Science & Engineering
she/her/hers
Research Interests: Semiconductor materials and devices; BEOL monolithic integration of semiconductor devices with silicon CMOS; wide bandgap and ultra wide band gap semiconductors for power and high temperature devices.