Becky Peterson

Becky Peterson

Associate Professor, EECS - Electrical and Computer Engineering

Director, Lurie Nanofabrication Facility

Associate Professor (courtesy), Applied Physics, Materials Science & Engineering

she/her/hersEmail: Phone: (734)615-3105Office: 2302 EECSWebsiteResearch Interests:
Semiconductor materials and devices; BEOL monolithic integration of semiconductor devices with silicon CMOS; wide bandgap and ultra wide band gap semiconductors for power and high temperature devices.