Becky (R.L.) Peterson

Associate Professor, Electrical Engineering and Computer Science

Director, Lurie Nanofabrication Facility

Associate Professor (courtesy), Applied Physics, Materials Science & Engineering

she/her/hersEmail: Phone: (734)615-3105Office: 2302 EECSWebsiteResearch Interests: Oxide semiconductor materials and devices; 3D-IC heterointegration of oxide-based thin film electronics with silicon CMOS; solution-processed inorganic electronic materials; crystalline gallium oxide for power devices.