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Solid-State and Nano Seminar

Wireless battery-less and High mass sensitivity Surface Acoustic Wave Sensors

Honglang LiProfessorLab of Acoustic MEMSϼœInstitute of Acoustics, Chinese of Academy of Sciences, Beijing, China

Surface Acoustic devices (SAW) on the basis of piezoelectric crystals are promising technology for two kinds of applications with compact size and low price. On one hand, since SAW devices are inherited with 200 times higher Q factor than the Silicon-based circuit, SAW sensor (for example Temperature/Pressure/Strain) can be excited with very low energy supply by harvesting wireless energy. On the other side, due to its higher working frequency of 100MHz, SAW sensor can achieve high sensitivity, and also can be applied for gas and liquid sensing. We firstly review various acoustic wave sensor configurations and characteristics, then focus on wireless battery-less physical parameters sensors and several high mass sensitivity ones. Corresponding theoretical analysis of acoustic wave sensors and experimental results will be presented.

Honglang Li was born in Hubei Province, China, in 1976. He received his B.S. degree in microelectronics from Hunan University in 1998 and Ph. D degree in Acoustics from the Institute of Acoustics, Chinese Academy of Sciences in 2003.
From 2003 to 2005, he joined the Venture Business Laboratory, Chiba University as a post-doctoral fellow. He served as an associate professor from 2005 and a professor from 2011 at the Institute of Acoustics, Chinese Academy of Sciences. He was a Visiting Scientist of Department of Electronic Engineering, Tohoku University, Japan. Currently, he is also the Co-founder of SENCAS company which focused on Acoustic MEMS and Sensor.
His current theoretical research focused on FEM/BEM, and COM analysis acoustic wave sensor, optimization of surface acoustic wave (SAW) devices, and combing theoretical analysis. His application related research is extended to SAW Chemical, Biosensor, SAW Temperature/Pressure/Strain sensors and their applications in wireless and batterless condition. He has published more than 60 academic papers, and was granted 28 patents.

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