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Veeco MEMS Metrology Symposium

Wayne MozerVeeco Instruments

Join Veeco engineers for a free, two-day symposium at the MNF on surface metrology for MEMS applications. Veeco’s Wyko optical profilers and Dektak stylus profilers utilize industry-leading surface characterization technology and incorporate many features developed specifically for the study of MEMS devices, enabling quantitative R&D, failure analysis, and QA data.

The morning of Day 1 (Tuesday, Jan. 29, 9 am-4 pm) will include lectures on atomic force microscopy, stylus profilers, optical profilers, and both static and dynamic measurements. The afternoon will feature demonstrations of Veeco’s NT1100D static and dynamic profiler. Attendees are invited to bring their own samples to be measured. Day 2 (Wednesday, Jan. 30, 9 am-2 pm) will offer further opportunities for attendees to measure their own samples.

The symposium is open to anyone interested. Pre-registration is not required in order to attend, but lunch will be provided on Tuesday for pre-registered attendees. To pre-register, contact Sandrine Martin (sandrine@eecs.umich.edu) or Nadine Wang (nwang@eecs.umich.edu).

Sponsored by

Michigan Nanofabrication Facility